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What is a horizontal annealing furnace What are its characteristics and advantages?

In today's society, the industry is developing steadily. For many industries, horizontal annealing furnaces are an excellent machine. Do you know what the characteristics of the horizontal annealing furnace are? What are the advantages? This article will introduce you to the horizontal annealing furnace in detail, let's take a look.
 

What is a horizontal annealing furnace

An annealing furnace is a process used in the manufacture of semiconductor devices that includes heating a plurality of semiconductor wafers to affect their electrical properties. Heat treatment is designed for different effects. The wafer can be heated to activate the dopant, convert the film into a thin film or convert the film into a wafer substrate interface, make a densely deposited film, change the state of the grown film, repair the implanted damage, move the dopant or dope The agent is transferred from one film to another or from the film into the wafer substrate. The annealing furnace can be integrated into other furnace processing steps, such as oxidation, or it can be disposed of by itself. The annealing furnace is completed by equipment designed to heat semiconductor wafers. The annealing furnace is an energy-saving periodic working furnace with ultra-energy-saving structure and fiber structure, saving 60% of electricity.

Annealing furnace

Horizontal annealing furnace features

The horizontal annealing furnace skeleton is welded by various steel profiles. The outer frame is made of channel steel as the main beam, the surrounding plate is made of cold sheet, the horizontal annealing furnace of the trolley is used as the main beam, and the bottom plate and the front and rear end plates are made of medium plate. Horizontal annealing furnace transmission part: The trolley transmission adopts electric motor and reducer to drive the front end of a set of driving wheels through the chain. The door drive is a combination of a worm gear reducer and an electric motor. Sealing: The trolley and the furnace body are sealed with a labyrinth structure, and there are automatic sand sealing knife sealing devices on both sides of the trolley. The furnace door seal adopts the raceway compression and spring compression automatic mechanism to seal the furnace body part and adopts high-quality refractory brick structure to ensure the furnace seal. High-aluminum bricks are used in the pressure-resistant part of the trolley, and insulated bricks are added in the lower part. Horizontal annealing furnace combustion system: several burners are installed on both sides of the oil furnace, and the heat flow reciprocates in the furnace to ensure the uniformity of the furnace temperature. Automatic and semi-automatic models can be selected as needed. Preheating device for exhausting smoke: a preheating device for exhausting smoke is installed at the upper end of the furnace. When the flue gas in the furnace passes through the preheater, the fan sends cold air to preheat, and then the pipeline is sent to the burner for combustion. A manual disc valve is installed at the outlet, which regulates the pressure in the furnace. Widely used in chemical, petroleum, food, metallurgy, machinery, light industry, electric power, shipbuilding, paper, mining, medicine, central heating and other industrial sectors of heating, cooling, condensation, evaporation and other processes.
 

Advantages of horizontal annealing furnace

The annealing furnace heat flow reciprocates in the furnace, the furnace temperature uniformity is good, no noise, no environmental pollution, small heat storage, less heat loss, high temperature control precision, high furnace temperature uniformity, high degree of automation, simple operation, Adopt PID programming settings, fully automatic performance, good sealing, long life, safe and reliable.
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